Specialized Mass Flow Controller - Display MFM

LD030M

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Model LD030M
Range(N2) 0.01slpm~30slpm
Accuracy ±1% of FS
Repeatability ±0.25%
In/Out Signal 0~5Vdc
Supply Power +15 or +24Vdc, 350mA
Max Operating Pressure < 90 bar
Max Operating Temp 0~50℃
Leak Rate 1X10-9atm. cc/sec
Control Range 3~100%


Connection "A" Dimension(mm)
1/8" SW 140.2
1/4" SW 141.5
3/8" SW 147.8
1/4" VCR 141.3

 

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